This ultra-pure water system serves a domestic 8-inch wafer fabrication leader, supporting production processes from 0.5μm to 110nm node technologies including mainstream logic, mixed-signal, embedded non-volatile memory, high-voltage and image sensor applications.
The system has maintained stable operation with compliant water quality parameters (resistivity ≥18.2 MΩ·cm at 25°C, particles <5/mL >0.1μm, TOC <1 ppb) since its commissioning in October 2018, with performance fully validated by the client.
